Gas sensor array for detecting individual gas constituents in a gas mixture
US6235243A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 12, 1992 |
| Grant date | May 22, 2001 |
| Priority date | — |
| Expiry date | Aug 12, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0031
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas sensor array for detecting individual gas constituents in a gas sensor, said array being composed of a carrier member of a non-conductive substrate having a plurality of individual sensor elements formed by semiconductor oxides being applied thereon in a planar arrangement and the array is provided with contact electrode arrangements for measuring electrical conductivity, with a heating arrangement for heating a predetermined operating temperature and with protective sheaths for protecting the arrangement against external influences along with a fastening base so that the individual operating temperatures allocated to the various sensors and wherein the differences between respective sensor signals are formed for detecting the individual gas constituents, with these differences being supplied to a processing unit. In a preferred embodiment, at least one part of the individual sensor element is composed of a .beta.-Ga.sub.2 O.sub.3 thin film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.