Ion source for generating ions of a gas or vapor
US6236054A · kind A · utility
Inventors
Key dates
| Filing date | Dec 15, 1999 |
| Grant date | May 22, 2001 |
| Priority date | — |
| Expiry date | Dec 15, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3114
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion source for generating ions of a gas or vapor, especially for thinning solid state samples, includes a housing, an arrangement for introducing the gas or vapor into the housing and an anode positioned within the housing. The anode has a rotationally symmetrical cavity which is open at both sides along the axis of the source. First and second electrooptical mirrors are disposed along the source axis and define therebetween a space in which the anode is positioned The mirrors produce an electrostatic field to cause electrons to oscillate between them. At least one of the mirrors is apertured for exit therethrough of a fraction of ions generated in the space. An electron generating arrangement is disposed at one side of the cavity externally of the space between the mirrors and further, an arrangement causes the electrons to move into the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.