Method for making topographic projections
US6236445A · kind A · utility
235Cited by
11References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 22, 1996 |
| Grant date | May 22, 2001 |
| Priority date | — |
| Expiry date | Feb 22, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/13394
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for producing topographic projections, especially useful for producing many small projections of less than about 100 .mu.m in diameter and in height. This method is useful for making contact pads of membrane probes used to test integrated circuits and spacers of liquid crystal light valves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.