Apparatus and method for retaining a device for processing
US6236902A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 24, 1998 |
| Grant date | May 22, 2001 |
| Priority date | — |
| Expiry date | Feb 24, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/136
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a device processing system, an apparatus and method for retaining a device that is to be transferred to or from the apparatus at a transfer location and processed at a processing location that is spaced from the transfer location is shown and described. A first device is placed on a first chuck at the transfer location with the chuck facing a first direction. The apparatus then rotates from a first position to a second position in which the device is at the processing location and facing in a second direction which is different from the first direction. While the apparatus is in the second position, a second device may be placed on a second chuck that is now oriented in the first direction at the transfer location. When the apparatus is rotated from the second position to the first position, the first device is returned to the transfer location and the second device is moved into the processing location.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.