Micro-machined device for fluids and method of manufacture
US6237619A · kind A · utility
60Cited by
9References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 1, 1999 |
| Grant date | May 29, 2001 |
| Priority date | — |
| Expiry date | Apr 1, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0491
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The invention relates to a micro-machined fluid-flow device (10) comprising a substrate (12) possessing a flow duct (14), a deformable thin layer (18) such a pump membrane or a valve-forming membrane. According to the invention, the thin layer (18) is a rolled metal sheet, preferably made of titanium, and connected to the substrate (12) in the zone (20) overlapping the flow duct, by an anodic bonding. The invention is applicable to making a valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.