Chemical liquid supply method and apparatus thereof
US6238576A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 12, 1999 |
| Grant date | May 29, 2001 |
| Priority date | — |
| Expiry date | Oct 12, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC02F1/20
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Impure portions such as air bubbles and gelled portions in a liquid are removed so that the liquid can be discharged with improved cleanliness. Under condition that a return flow path and a liquid discharge flow path are closed, a pump chamber is expanded, thereby sucking the liquid in a liquid container portion into a pump chamber through a filter. Under condition that a vent port of the filter and the return flow path are opened and a liquid introducing flow path, the liquid discharge flow path, and a pump inlet flow path are closed, the pump chamber is contracted, thereby returning the liquid in the pump chamber toward the filter so that air in the filter is exhausted to the outside. Under condition that the return flow path and the pump inlet flow path are closed, the pump chamber is contracted, thereby discharging the liquid from the nozzle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.