Process for production of a structure of color filter layer system regions
US6238583A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 16, 1998 |
| Grant date | May 29, 2001 |
| Priority date | — |
| Expiry date | Jun 16, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/201
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A first coating layer structure 3.sub.a is produced by coating, alignment, exposure and development. On this coating layer structure 3.sub.a is deposited the first colour filter layer system 5.sub.a0,5.sub.a1. Over the entire colour filter layer system 5 is deposited a sacrificial layer 7. Outside the vacuum container the coating layer structure is dissolved and with it the colour filter layer system regions 5.sub.a0 are removed. A further process of coating, alignment, exposure and development is carried out to create a coating layer structure 3.sub.b. Next the second colour filter layer system 5.sub.b and the second sacrificial layer 7.sub.b are deposited. Thereby the sacrificial layer 7 withstands the step of dissolving the coating and can be removed finally without damaging the colour filter layer system regions. Accordingly, any flakes 9 remaining from the lift-off are removed with the sacrificial layer 7.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.