Milliactuator with integrated sensor and drivers and method of manufacturing the same
US6239947A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 11, 1998 |
| Grant date | May 29, 2001 |
| Priority date | — |
| Expiry date | May 11, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/5552
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A milliactuator integrated with driver and relative position error sensor circuits formed on a single silicon substrate. The integrated milliactuator/electronics module is positioned between the suspension and the slider/transducer assembly to provide rapid, small motion position control of the slider/transducer over data tracks on the disk of a magnetic disk drive. Integration of the milliactuator electronics with the milliactuator reduces parasitic loading and interference problems with the magnetic transducer signals. Electronic circuits are built on a silicon wafer followed by deposition of a planarization layer and a ground plane layer for isolation from the milliactuator which is then built on top of the circuits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.