Method and device for treating holes or recesses extending into workpieces with liquid treatment media

US6240934A · kind A · utility

Assignee

• Atotech Deutschland GmbH & Co. KG · DE

Inventors

• Franz Durst · Langensendelbach, DE
• Günter Brenn · Erlangen, DE
• Michael Schäfer · Hüttenberg, DE
• Heinrich Meyer · Berlin, DE
• Heribert Streup · Berlin, DE

Key dates

• Filing date: Aug 16, 2000
• Grant date: Jun 5, 2001
• Expiry date: Aug 16, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05K3/0088
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

The treatment, for example the cleaning of holes or recesses in workpieces, is problematic when the holes or recesses have an opening width of below 0.5 mm, and especially when the latter do not penetrate the workpiece (blind bores). In known methods, gas bubbles adhering to the side-walls of holes of this type cannot be removed or liquids situated within the holes cannot be effectively exchanged. With the method according to the invention an effective exchange of the liquid contained in the holes and situated outwith the holes is made possible. For this purpose the liquid treatment means is sprayed as a jet into the holes, said jet having a diameter which is smaller than that of the holes. Furthermore, a device is described for carrying out this method which is characterised by a nozzle with one or several nozzle discharge openings with a diameter below 0.5 mm, by a liquid supply unit by means of which liquid treatment medium is pumped through the nozzle discharge openings and by a filter unit, communicating with the openings and the feeder unit, for removing particles from the treatment medium.