Array and method for coating of objects
US6241823A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 26, 1999 |
| Grant date | Jun 5, 2001 |
| Priority date | — |
| Expiry date | May 26, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for performing two-dimensional surface coating of objects includes a hollow cylinder open at opposite ends thereof, a plunger axially moveable therein and having at least one receptacle with a receiving opening of an axial extent through which the object can be inserted and removed, and a first conveying device for conveying objects to be coated. The hollow cylinder has at least one first area and a second area which can be sealed off from the plunger, the at least one first area being at an end of the hollow cylinder and having an axial extent greater than the axial extent of the receiving opening. The second area is sealed against atmospheric pressure relative to the plunger regardless of plunger position. The second area of the hollow cylinder is constructed and arranged for passing transversely therethrough by the conveying device when the receptacle is aligned therewith, for transfer of an object to or from a coating device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.