Apparatus for the coating of substrates in a vacuum chamber

US6241824A · kind A · utility

Assignee

• Leybold Systems GmbH · DE

Inventors

• Gunter Brauer · Lehre, DE
• Hermann Kloberdanz · Gelnhausen, DE
• Hans-Georg Lotz · Grundau, DE
• Jochen Schneider · Tettnang, DE
• Alfons Zoller · Salmünster, DE
• Harro Hagedorn · Frankfurt, DE
• Michael König · Frankfurt, DE
• Jurgen Meinel · Dreieich, DE
• Gotz Teschner · Hanau, DE

Key dates

• Filing date: Aug 4, 1999
• Grant date: Jun 5, 2001
• Expiry date: Aug 4, 2019

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/568
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

In an apparatus for the coating of substrates in a vacuum with rotatable substrate carriers (15,16,20) and with a loading and an unloading station (8 or 9), two vacuum chambers (3,4) are provided with several coating stations (6,7 or 10 to 14), directly next to one another, wherein a rotatable transport arm (15 or 16) is accommodated in each of the two chambers (3, 4), and the transport planes of the two transport arms (15,16) are aligned with one another. In the separation area of the two chambers (3,4), an air lock is provided with a corresponding transfer apparatus (5) with two transport arms (15,16), whose rotary plate (20) is provided with substrate storage unit (21,22) and projects about halfway into one chamber (3) and halfway into the other chamber (4), wherein one chamber (3) has both the loading as well as the unloading station (8 or 9).