Patent · US Expired

Method for temperature controlled spin-coating systems used for making compact discs

US6242044A · kind A · utility

2Cited by
4References
14Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMay 11, 1999
Grant dateJun 5, 2001
Priority date
Expiry dateMay 11, 2019

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T279/11
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

Disclosed is method and apparatus for distributing a chemical over the surface of a substrate. The method includes depositing the chemical on a portion of the surface of a substrate near the center of the substrate. The method further includes controlling the temperature of the surface of a substrate so that the viscosity of the chemical is calibrated to cause the chemical to be deposited on the surface of the substrate in a substantially uniform manner.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.