Patent · US Expired

Semiconductor device and manufacturing method thereof

US6242787A · kind A · utility

96Cited by
25References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 15, 1996
Grant dateJun 5, 2001
Priority date
Expiry dateNov 15, 2016

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D89/601

Abstract

A semiconductor device including a reduced surface field strength type LDMOS transistor which can prevent the breakdown of elements at channel formation portions when a reverse voltage is applied to its drain. A P well and an N well are formed in an N-type substrate to produce a double-well structure, with a source electrode being set to be equal in electric potential to the N-type substrate. The drift region of the N well has a dopant concentration to satisfy the so-called RESURF condition, which can provide a high breakdown voltage a low ON resistance. When a reverse voltage is applied to a drain electrode, a parasitic bipolar transistor comprising the N well, the P well and the N-type substrate develops to form a current-carrying path toward a substrate, so that the element breakdown at the channel formation portions is avoidable at the application of the reverse voltage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.