Dynamic optical micrometer
US6243168A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 1, 1999 |
| Grant date | Jun 5, 2001 |
| Priority date | — |
| Expiry date | Apr 1, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dynamic optical micrometer for measuring the position of a moving object is invented. The optical micrometer includes a laser for generating an optical signal, an RF signal generator, an acousto-optic modulator that is responsive to the optical signal and the RF signal and is operative to provide a first light beam and a second light beam that is up shifted in frequency by the RF frequency, an optical interferometer that reflects the first beam off the object and interferometrically combines the reflected light beam and the second light beam into a heterodyned signal, means responsive to the heterodyned signal and operative to produce an electrical signal at the optical beat frequency corresponding to the RF and means responsive to the RF signal and the electrical signal and operative to provide a linear output signal that corresponds to the position of the object. A method for accomplishing the same is also invented.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.