Process for purifying a cryogenic fluid containing N2O, CnHm and/or NOx impurities

US6244071A · kind A · utility

Assignee

• L'Air Liquide, Societe Anonyme Pour l'Etude et l'Exploitation des Procedes Georges Claude · FR

Inventors

• Daniel Gary · Montigny-le-Bretonneux, FR
• Serge Moreau · Vélizy-Villacoublay, FR
• Dominique Fournis · Voisins-le-Bretonneux, FR

Key dates

• Filing date: Oct 20, 1999
• Grant date: Jun 12, 2001
• Expiry date: Oct 20, 2019

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P20/151
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

A process for purifying a cryogenic fluid, especially argon, helium or oxygen, containing N.sub.2 O, C.sub.n H.sub.m or NO.sub.x impurities, in which the impurities are removed by bringing the cryogenic fluid to be purified into contact with particles of an adsorbent having an average size of less than or equal to 1.5 mm, preferably from 0.8 mm to 1.1 mm. A purified cryogenic fluid is then recovered which contains less than 100 ppb of impurities, preferably less than 10 ppb of impurities. This process can be used for producing ultrapure gases intended especially for the electronics field.