XY table
US6244192A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2000 |
| Grant date | Jun 12, 2001 |
| Priority date | — |
| Expiry date | Jan 31, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG12B5/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An XY table provided with an X-axis table (3) supported on a base movably in the X-axis direction, a Y-axis table (12) supported on the base movably in the Y-axis direction, and a top table (20) movable in the X-axis direction together with the Y-axis table (12), and further provided with an armature (6) of a linear motor (5) mounted on an X-axis base (1) supporting the X-axis table (3), a movable element (7) mounted on the back of the X-axis table (3) and opposed to the armature (6), and armature (15) of a linear motor (14) mounted on a Y-axis base (10) supporting the Y-axis table (12), and a movable element (16) mounted on the back of the Y-axis table (12) and opposed to the armature (15). The top table can be positioned with high precision and moved at high acceleration and deceleration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.