Micromachined element and method of fabrication thereof
US6245444A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 2, 1997 |
| Grant date | Jun 12, 2001 |
| Priority date | — |
| Expiry date | Oct 2, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined element mounted to a substrate, the element including a cantilever having a proximal portion attached to the substrate and a coilable distal portion terminating in a free distal end. The coilable distal portion, upon being heated, is capable of bending away from the substrate and at least partially coiling upon itself to form a coiled portion. At least part of the micromachined element may be electrically conductive. In various embodiments, the micromachined element may function as a mechanical microspring, an electrically conductive link, and/or a magnetic coil. A method of fabricating the microelement may include the steps of selectively depositing various layers upon the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.