Patent · US Expired

Semiconductor device with flat protective adhesive sheet and method of manufacturing the same

US6245593A · kind A · utility

57Cited by
7References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 24, 1999
Grant dateJun 12, 2001
Priority date
Expiry dateNov 24, 2019

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2221/68327
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A semiconductor device has a semiconductor wafer having sensing portions exposed on a surface thereof and an adhesive sheet attached to the semiconductor wafer as a protective cap to cover the sensing portions. The adhesive sheet is composed of a flat adhesive sheet and adhesive disposed generally on an entire surface of the adhesive sheet. Adhesion of the adhesive is selectively reduced by UV irradiation to have adhesion reduced regions, and the adhesion reduced regions face the sensing portions. The protective cap can be produced with high productivity, and securely protect the sensing portions when the semiconductor wafer is diced and is transported.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.