Laser writing method and apparatus
US6246706A · kind A · utility
22Cited by
13References
63Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 27, 1999 |
| Grant date | Jun 12, 2001 |
| Priority date | — |
| Expiry date | May 27, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/704
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser writing system includes a high reflector and an output coupler that define an oscillator cavity. A gain medium and a mode locking device are positioned in the oscillator cavity. A diode pump source produces a pump beam that is incident on the gain medium and an output beam is produced. A support holds a workpiece. Means are provided for directing the output beam across the workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.