Shadow sculpted thin films
US6248422A · kind A · utility
31Cited by
17References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 12, 1998 |
| Grant date | Jun 19, 2001 |
| Priority date | — |
| Expiry date | Nov 12, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24174
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A thin film microstructure is formed from a substrate having a film of vapor deposited material extending in distinct helical columns from the substrate. The distinct helical columns may terminate distally from the substrate in a region of denser material forming a cap for the helical columns. The cap and substrate may be each connected, respectively, to first and second electrodes, and may operate in conjunction with an acoustic wave sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.