Method of fabricating a surface shape recognition sensor
US6248655A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 29, 2000 |
| Grant date | Jun 19, 2001 |
| Priority date | — |
| Expiry date | Feb 29, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface shape recognition sensor of this invention includes at least a plurality of capacitance detection elements having sensor electrodes arranged in the same plane on an interlevel dielectric film formed on a semiconductor substrate to be insulated/isolated from each other, capacitance detection means for detecting the capacitances of the capacitance detection elements, and a stationary electrode disposed on the interlevel dielectric film to be insulated/isolated from the sensor electrodes. When an object to be recognized touches the upper surface of the stationary electrode, the capacitances detected by the capacitance detection elements change in accordance with the recesses/projections on the upper surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.