Optical apparatus
US6249367A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 31, 1999 |
| Grant date | Jun 19, 2001 |
| Priority date | — |
| Expiry date | Aug 31, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0816
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical apparatus of the present invention is characterized by having a stationary portion, a movable portion having an optical member and a semi-cylindrical shape, the movable portion being rotationally movable relative to the stationary portion, a hydrostatic bearing for supporting a semi-cylindrical surface of the movable portion without contact with the stationary portion, and an actuator for actuating the movable portion relative to the stationary portion without contact therewith in a direction of rotation. The optical member is supported and driven in a non-contact state, so as to reduce positional deviation of rotation center of the optical member and decrease friction torque, thereby providing the optical apparatus that can act at high accuracy and at high speed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.