Precision dispensing pump and method of dispensing
US6250502A · kind A · utility
88Cited by
7References
26Claims
0Family size
Inventors
Key dates
| Filing date | Sep 20, 1999 |
| Grant date | Jun 26, 2001 |
| Priority date | — |
| Expiry date | Sep 20, 2019 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61M2005/14513
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A precision dispensing pump for dispensing fluids and method of dispensing for use in semiconductor packaging and/or semiconductor assembly. The precision dispensing pump employs a working fluid displacement drive for volumetric displacement of a working fluid, a dispensing reservoir for containment of dispensing fluid and a isolation diaphragm for isolating the working fluid from dispensing fluid in the dispensing reservoir. Volumetric displacement of dispensing fluid in the dispensing reservoir is proportional to volumetric displacement of working fluid in the working fluid displacement drive.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.