Method and apparatus for imaging a sample on a device
US6252236A · kind A · utility
49Cited by
22References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 6, 1999 |
| Grant date | Jun 26, 2001 |
| Priority date | — |
| Expiry date | Jul 6, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/6441
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for imaging a sample are provided. An electromagnetic radiation source generates excitation radiation which is sized by excitation optics to a line. The line is directed at a sample resting on a support and excites a plurality of regions on the sample. Collection optics collect response radiation reflected from the sample I and image the reflected radiation. A detector senses the reflected radiation and is positioned to permit discrimination between radiation reflected from a certain focal plane in the sample and certain other planes within the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.