Light-absorbing polymers and application thereof to anti-reflection film
US6255405A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2000 |
| Grant date | Jul 3, 2001 |
| Priority date | — |
| Expiry date | Mar 23, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC09D5/32
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
A high-performance anti-reflective coating which highly absorbs a given light, e.g., deep ultraviolet rays, tenaciously adheres to substrates upon coating formation, is satisfactory in covering, and eliminates the influence of standing waves in the production of integrated circuits; novel light-absorbing polymers for forming the anti-reflective coating; and a process for producing the polymers. One of the polymers is produced by esterifying a copolymer comprising carboxylic anhydride groups and/or dicarboxylic acid groups such as maleic acid as basic recurring units with a hydroxylated aromatic chromophore. The unreacted carboxylic acid groups or acid anhydride groups remaining in the esterified light-absorbing polymer may be amidated and/or imidized with an aminated aromatic compound. Each of these polymers is dissolved in an organic solvent comprising an alcohol, aromatic hydrocarbon, ketone, ester, or combination of these, and the solution is applied to a substrate and then baked to form an anti-reflective coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.