Overall equipment effectiveness on-line categories system and method
US6256550A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 7, 1998 |
| Grant date | Jul 3, 2001 |
| Priority date | — |
| Expiry date | Aug 7, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/80
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A manufacturing control and reporting method/system for manufacture of semiconductor devices comprises a system for loading a mechanical article handling device in a semiconductor manufacturing system, provides an automatic check-in and changing equipment status to an UP status, automatically checking whether the article handling system is empty, and for automatically changing the system status to an IDLE status. The system provides automatic check-in, and subsequent to processing of the workload by the plant provides track-out followed by automatically checking whether the article handling system is empty. Then the system checking whether a TE has arrived, and the system checks whether the TE has reloaded the article handling system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.