Capacitive pressure sensor having petal electrodes
US6257068A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 15, 1999 |
| Grant date | Jul 10, 2001 |
| Priority date | — |
| Expiry date | Nov 15, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive pressure sensor includes a housing element, a first electrode assembly and a second electrode assembly. The first electrode assembly includes a deformable elastic member, and a plurality of petal electrodes. The petal electrodes are attached to the elastic member and extend from the elastic member in a direction which is substantially perpendicular to the surface of the elastic member. The elastic member of the first electrode assembly is secured at its perimeter to the housing element at an aperture in the housing, so that the petal electrodes are enclosed within the housing. The second electrode assembly is also enclosed within the housing and is surrounded by the elongated electrodes. The spatial relationship between the petal electrodes and the second electrode assembly is directly related to the capacitance measured between them. As pressure is applied to the outer surface of the elastic member, the elastic member deflects and causes the spatial relationship between the petal electrodes and the second electrode to change, which causes the capacitance measured between them to change.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.