Process for working a preform made of an oxide single crystal, and a process for producing functional devices
US6257224A · kind A · utility
102Cited by
6References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 26, 1998 |
| Grant date | Jul 10, 2001 |
| Priority date | — |
| Expiry date | Feb 26, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T225/12
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A process for dicing a preform made of an oxide single crystal into cut pieces each having a given shape, includes the steps of removing molecules of the oxide single crystal through dissociation and evaporation with an optochemical reaction under irradiation of a laser beam upon the preform, thereby forming grooves on the preform, and then cleaving the preform along the groove.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.