CMP products
US6258137A · kind A · utility
118Cited by
20References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 6, 1999 |
| Grant date | Jul 10, 2001 |
| Priority date | — |
| Expiry date | Oct 6, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2993
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m.sup.2 /gm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.