Use of barrier refractive or anti-reflective layer to improve laser trim characteristics of thin film resistors
US6259151A · kind A · utility
52Cited by
12References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 21, 1999 |
| Grant date | Jul 10, 2001 |
| Priority date | — |
| Expiry date | Jul 21, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/16
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A precision resistor of NiCr or SiCr has a refractive and thermal barrier layer beneath the resistor. The refractive barrier is a layer of refractory metal. The refractory metal prevents the incident laser beam of a laser trimmer penetrating lower layers of the device. Unwanted reflections and refractions caused by lower layers are avoided. The reflective barrier layer is a material selected from the group consisting of tungsten, titanium, molybdenum, TiSi.sub.2.sup.l3,14, CoSi.sub.2.sup.15, MoSi.sub.2, TaSi.sub.2 and WSi.sub.2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.