Sensor and method for manufacturing a sensor

US6259350A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Roland Mueller-Fiedler · Leonberg, DE
• Christoph Treutler · Wannweil, DE
• Michael Gundlach · Hersbruck, DE
• Manfred Moellendorf · Los Altos, US
• Steffen Schmidt · Dresden, DE
• Franz Laermer · Stuttgart, DE
• Christoph Kampshoff · Reutlingen, DE
• Klaus Heyers · Reutlingen, DE
• Joerg BUTH · Gerlingen, DE

Key dates

• Filing date: Jan 21, 1997
• Grant date: Jul 10, 2001
• Expiry date: Jan 21, 2017

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C04B2111/00844
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

With a sensor and method, it is possible for platinum resistor elements to be used advantageously as heating elements, temperature sensors, printed circuit traces, or as chemically resistant electron beam sensitive layers. To ensure a long-lasting adhesion of the platinum resistance layer to a dielectric substrate, even during exposure to temperatures which are elevated over ambient temperature and under dry and most atmospheric conditions, a thin adhesion layer of platinum silicide, for example, is deposited between the platinum resistance layer and the dielectric substrate. Resistor elements patterned from the platinum layer can advantageously be used in temperature sensors, mass flow sensors, chemical sensors, gas sensors, or humidity sensors.