Micro-mirror device
US6259548A · kind A · utility
34Cited by
3References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 23, 1999 |
| Grant date | Jul 10, 2001 |
| Priority date | — |
| Expiry date | Sep 23, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro-mirror device includes a mirror forming substrate on which a mirror is disposed. A pair of torsion beams are disposed on opposing sides of the mirror forming substrate. An anchor projects from a supporting substrate, supporting the ends of the torsion beams. A driving frame surrounds at least one side of the torsion beams and is connected to the mirror forming substrate through a link beam. A drive force generator drives the driving frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.