Passivation for micromechanical devices
US6259551A · kind A · utility
12Cited by
5References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 27, 1999 |
| Grant date | Jul 10, 2001 |
| Priority date | — |
| Expiry date | Sep 27, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A non-volatile passivation coating for micromechanical devices. The device has at least one surface (10) that contacts other surfaces and requires passivation. The passivation is provided by a monolayer of molecules (16) that has cross links (18) between the monolayers, or is of an highly stable material. The monolayer is applied by vacuum vapor coating, melt coating or coating from solution. The non-volatility of the monolayer eliminates the need for a hermetic package.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.