Method for producing a monolithic multilayer piezo actuator

US6260248A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Dieter Cramer · Graz, AT
• Hans-Martin Hellebrand · Hersbruck, DE
• Karl Lubitz · Ottobrunn, DE

Key dates

• Filing date: Oct 19, 1998
• Grant date: Jul 17, 2001
• Expiry date: Oct 19, 2018

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49163

Abstract

A method for manufacturing a monolithic piezoelectric actuator of multilayer design and having a high aspect ratio of more than two built up from a plurality of smaller stacks in a multilayer design, includes alternately layering green piezoceramic films and electrode material, compressing the layers while elevating the temperature to remove the binder and thereby form a composite, stacking several of the composites on one another, and sintering the stack so as to form the monolithic piezoelectric actuator which exhibits an improved mechanical strength with good piezoelectric properties.