Apparatus and method for supplying uninterrupted gas
US6260568A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 6, 1999 |
| Grant date | Jul 17, 2001 |
| Priority date | — |
| Expiry date | Oct 6, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8733
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An apparatus and a method for supplying uninterrupted gas by using an automatic switching gas supply system are provided. In the apparatus, a main gas supply source and at least one back-up gas supply source are provided which are connected by a plurality of conduits to a process tool. The conduits further include pressure regulators such that a gas pressure from the main gas supply source is always regulated at about 0.5 Kg/cm.sup.2.about.1 Kg/cm.sup.2 higher than a gas pressure from the back-up gas supply source. The apparatus operates by pneumatic means so that no electric power is required. The apparatus further operates automatically by switching from the main gas supply source to the back-up gas supply source when the pressure drop in the main gas supply source exceeds the pressure differential that is preset in the system, e.g., between about 0.5 Kg/cm.sup.2 and about 1 Kg/cm.sup.2. Any other suitable range of pressure differential may also be used depending on the type of gases transported and the conduits used.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.