Air separation of polysilicon

US6260712A · kind A · utility

Assignee

• Wacker Chemie AG · DE

Inventors

• Dirk Flottmann · Altötting, DE
• Matthaus Schantz · Simbach, DE
• Johann Heiss · Tittmoning, DE

Key dates

• Filing date: Aug 20, 1999
• Grant date: Jul 17, 2001
• Expiry date: Aug 20, 2019

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S209/932
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A separation device which has at least one blower device and at least one deflector device can be used to separate large fragments of semiconductor material from small fragments of semiconductor material.