Process gas decomposition reactor
US6261525A · kind A · utility
Inventor
Key dates
| Filing date | May 17, 2000 |
| Grant date | Jul 17, 2001 |
| Priority date | — |
| Expiry date | May 17, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2206/046
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A process gas decomposition reactor featuring two intertwined helical coils surrounding a gas flow path. Each of the two coils is energized by a separate magnetron having an associated waveguide and an inductive structural element which couples the microwave energy into the coil. The magnetic flux lines from the coil serve to confine ions and electrons within the coil, causing collisions and hence ionization of gas entering a flow path through the coil. The gas, containing HFCs and PFCs is broken down by such collisions with ions and electrons within the gas plasma. The gas displaced at the end of the coil contains decomposition products from the HFCs and PFCs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.