Patent · US Expired

Thermal type infrared sensing device, fabrication method for thermal type infrared sensing device, and infrared imaging system and infrared imaging apparatus

US6262418A · kind A · utility

5Cited by
4References
34Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 22, 1998
Grant dateJul 17, 2001
Priority date
Expiry dateOct 22, 2018

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J5/34
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A thermal type infrared sensing device has; a plurality of light-receiving electrodes for outputting a change of surface charge associated with a polarization that occurs in a dielectric when subjected to infrared radiation; and a plurality of compensation electrodes, corresponding one for one to plurality of light-receiving electrodes, for compensating the outputs of corresponding light-receiving electrodes, and wherein plurality of compensation electrodes are formed on a different substrate from a substrate on which plurality of light-receiving electrodes are formed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.