Radiation detection device and method of making the same
US6262422A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 1999 |
| Grant date | Jul 17, 2001 |
| Priority date | — |
| Expiry date | Feb 10, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/20189
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
Light-receiving devices are two-dimensionally arranged on a substrate, bonding pads electrically connected to the light-receiving devices in the respective rows or columns via signal lines are arranged on the outer periphery of the substrate, and a protective passivation film is disposed on the light-receiving devices and signal lines, thereby forming a light-receiving device array. On the light-receiving surface of the light-receiving device array, a scintillator made of columnar crystals of CsI is deposited. On the other hand, a resin frame formed like an elongated frame is disposed inside the bonding pads. Inside this frame, a protective film in which an inorganic film is held between organic films made of Parylene is laminated. The outer periphery of the protective film is in close contact with the resin frame with the aid of the coating resin.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.