Cathode arc source with target feeding apparatus
US6262539A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2000 |
| Grant date | Jul 17, 2001 |
| Priority date | — |
| Expiry date | Oct 13, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3491
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Apparatus for feeding a target into a chamber of a cathode arc source comprises support structure (22, 23, 24) attached to or integral with the cathode arc source (10), a cathode station (16, 17, 18) for receiving a target (18) in electrical connection with an arc power supply, wherein the cathode station is mounted for movement (21, 37) on the support structure relative to the chamber so as to feed the target into the chamber. The apparatus can also have a target cutter in the chamber for removing an upper portion of the target. A graphite target for feeding into the source is a composite of at least inner and outer sections, the inner section comprising graphite powder and having a density in the range 1.7-2.0 g/cm.sup.3 and the outer section comprising graphite powder and having a density that is at least 0.1 g/cm.sup.3 less than that of the inner section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.