Galvano-mirror
US6262827A · kind A · utility
85Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 27, 2000 |
| Grant date | Jul 17, 2001 |
| Priority date | — |
| Expiry date | Apr 27, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A galvano-mirror includes a mirror substrate provided with a frame, a mirror element and torsion bars rotatably connecting the mirror element to the frame. The mirror element is provided with a body having an obverse surface and a reverse surface. A mirror surface is formed on the obverse surface, while first electrodes are formed on the reverse surface. The galvano-mirror also includes an electrode substrate provided with second electrodes arranged in facing relation to the first electrodes. The electrode substrate is formed with a through-hole extending through a thickness thereof and facing the mirror element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.