Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling
US6262946A · kind A · utility
154Cited by
4References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 29, 1999 |
| Grant date | Jul 17, 2001 |
| Priority date | — |
| Expiry date | Sep 29, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG10K11/002
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
There is described a capacitive micromachined ultrasonic transducer array which is configured to minimize the excitation and propagation of plate waves traveling in the substrate and ultrasonic waves propagating at the interface between the array surface and the immersion fluid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.