Apparatus for X-ray analysis in grazing exit conditions
US6263042A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 24, 1999 |
| Grant date | Jul 17, 2001 |
| Priority date | — |
| Expiry date | Sep 24, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/419
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In order to achieve suitable positional resolution for an angular scan in Grazing Exit X-ray Fluorescence (GEXRF), the sample (2) should be irradiated with a small spot (14). Consequently, the fluorescent radiation yield is low so that the duration of a measurement is comparatively long. In order to mitigate this drawback, the invention proposes the use of an analyzing X-ray mirror (16) having a line focus (22) extending perpendicularly to the sample surface (4). The line focus (22) coincides with a line-shaped PSD (24), so that every position on the PSD corresponds to a given height on the mirror, which height itself corresponds to a given take-off angle of the fluorescent radiation relative to the sample surface. Excellent positional resolution and an attractive fluorescent radiation yield are obtained by irradiating the sample by way of a focused electron beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.