System and method for hydrodynamic loading and unloading of objects into and out of substantially touchless hydrodynamic transport systems
US6264404A · kind A · utility
5Cited by
15References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 7, 1999 |
| Grant date | Jul 24, 2001 |
| Priority date | — |
| Expiry date | Jul 7, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6779
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system for hydrodynamically loading objects into a manufacturing system is disclosed. The system comprises a receptacle for retaining fluid, the receptacle having an aperture for egress to a manufacturing system. At least one cassette is supported within the receptacle for retaining a plurality of objects and positioning one of the objects in a loading location in alignment with the aperture. At least one nozzle is also disposed within the receptacle for ejecting fluid and urging objects in the loading location into the aperture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.