Patent · US Expired

Process for reclaiming a suspension

US6264843A · kind A · utility

5Cited by

4References

3Claims

0Family size

Assignee

Wacker Siltronic Gesellschaft Fur Halbleitermaterialien AG · DE

Inventor

Peter Wiesner · Simbach, DE

Key dates

Filing date	Mar 16, 2000
Grant date	Jul 24, 2001
Priority date	—
Expiry date	Mar 16, 2020

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB28D1/025
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A process for reclaiming a suspension which is produced during the machining of semiconductor material and which contains a liquid, a substance with an abrasive action and abraded semiconductor material, includes separating off the substance with an abrasive action and then separating the liquid and the abraded material. In the process, the liquid and the abraded material are separated with the aid of a magnetic separator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.