Device and method for producing a multilayered material

US6265353A · kind A · utility

Assignee

• Theva Dünnschichttechnik GmbH · DE

Inventors

• Helmut Kinder · Freising, DE
• Markus Bauer · Oberkochen, DE
• Joachim Schwachulla · Munich, DE

Key dates

• Filing date: Apr 12, 1999
• Grant date: Jul 24, 2001
• Expiry date: Apr 12, 2019

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/24355
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

In a method for producing laminate, a buffer layer is applied to a substrate, with the buffer layer material being evaporated from the buffer layer material dispensing devices at an angle .alpha..sub.1.noteq.0 at the normal to the substrate surface onto the latter, before an oriented thin layer is evaporated. According to the invention, provision is made such that (a) following evaporation of the buffer layer and prior to the evaporation of the oriented thin layer, at least one cover layer is evaporated under deposition conditions that vary from those under which the buffer layer was applied, especially at a different pressure, different temperature, different rate, and/or different angle .alpha..sub.2.noteq..alpha..sub.1, especially .alpha..sub.2 <.alpha..sub.1, preferably .alpha..sub.2.apprxeq.0.degree. to the substrate surface normal, and/or is evaporated on the buffer layer in such fashion that the buffer layer has a biaxial texture and/or facets.