Scanning probe microscope with scan correction
US6265718A · kind A · utility
75Cited by
3References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2000 |
| Grant date | Jul 24, 2001 |
| Priority date | — |
| Expiry date | Apr 28, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/851
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.