Ceramic element, method for producing ceramic element, display device, relay device and capacitor
US6265811A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 10, 1998 |
| Grant date | Jul 24, 2001 |
| Priority date | — |
| Expiry date | Nov 10, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A ceramic element comprises a main actuator element 26 having an anti-ferroelectric film 22 and a pair of electrodes 24a, 24b formed on a first principal surface (front surface) of the anti-ferroelectric film 22, a vibrating section 18 for supporting the main actuator element 26, and a fixed section 20 for supporting the vibrating section 18 in a vibrating manner. The anti-ferroelectric film 22 after polarization has a region Zt in which its average dielectric constant is increased in an analog manner in accordance with a voltage V applied to the pair of electrodes 24a, 24b. Specifically, an expression of p/t.ltoreq.2.5 is satisfied provided that an average film thickness of the anti-ferroelectric film 22 is t, and a pitch between the pair of electrodes 24a, 24b is p. Accordingly, the mechanical displacement amount is changed in an analog manner in accordance with the applied voltage, making it possible to maintain a displacement amount equivalent to that obtained during application of a driving voltage, in a no voltage-loaded state after completion of application of the driving voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.