Method, apparatus and computer program product for identifying electrostatic discharge damage to a thin film device
US6265885A · kind A · utility
21Cited by
5References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 2, 1999 |
| Grant date | Jul 24, 2001 |
| Priority date | — |
| Expiry date | Sep 2, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2642
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method, apparatus and computer program product for identifying electrostatic discharge (ESD) damage to a thin film device. The method includes (1) determining a cold resistance of the thin film device, (2) determining a hot resistance of the thin film device, (3) calculating a heating delta resistance (HDR) from the hot and cold resistances and (4) comparing the HDR to a threshold value to ascertain if the thin film device has suffered ESD damage. The HDR of the thin film device is characterized by the following relationship: HDR=(hot resistance-cold resistance)/(cold resistance).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.