Cushioned wafer container
US6267245A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 8, 1999 |
| Grant date | Jul 31, 2001 |
| Priority date | — |
| Expiry date | Jul 8, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer container comprising a receptacle and door provides for horizontal minimal contact support of wafers and provides for vertical support without one surface support intermediate the front edge support and rear edge support. The wafer carrier has for each wafer two distinct levels of support axially offset from one another. The first level of support is by wafer shelves contacting the bottom surface at the left side and right side of each wafer. The second level of support is provided by cushions securing the wafer at the front edge and back edge without one surface support at the left and right edges. The cushions on the door and at the rear of the receptacle are preferably removable such as by folding or compressing the cushion unit. The cushions preferably have V-shaped wafer engaging elements to constrain the wafer edge and to provide a lower ramp surface to guide and lift the front and rear edges of the wafer upwardly from the first level to the second level of support when the door is placed in position in the open front of the container portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.